Properties of TiN/CrN superlattice hard coatings deposited by reactive magnetron sputtering
نویسندگان
چکیده
منابع مشابه
Photocatalytic Properties of Doped TiO2 Coatings Deposited Using Reactive Magnetron Sputtering
Mechanically robust photocatalytic titanium oxide coatings can be deposited using reactive magnetron sputtering. In this article, we investigate the effect of doping on the activity of reactively sputtered TiO2. Silver, copper and stainless steel targets were used to co-deposit the dopants. The films were characterised using XRD, SEM and EDX. Adhesion and mechanical properties were evaluated us...
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ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2018
ISSN: 1757-899X
DOI: 10.1088/1757-899x/400/3/032001